**6. Conclusions**

Graphene and graphite have been widely used in various applications owing to their special properties and structures. In particular, the surface properties of graphene and graphite are vital to the performance of many products utilizing these materials. XPS and ToF-SIMS are two main surface analysis techniques that have been used extensively and successfully to study the composition, structure, cleanliness, defects, and reactions of graphene and graphite surfaces. XPS is widely used to yield quantitative elemental and chemical state information of graphene and graphite surfaces. ToF-SIMS provides chemical composition and detailed molecular structure information of graphene and graphite surfaces with high sensitivity. A combination of XPS and ToF-SIMS has been shown to provide complementary information allowing a full and in-depth understanding of graphene and graphite surfaces, which facilitates the transition from fundamental research to practical applications.

*Surface Analysis of Graphene and Graphite DOI: http://dx.doi.org/10.5772/intechopen.108203*
