**5. Conclusion**

This chapter reviewed thin film deposition techniques in the PV industry and research and highlighted those which are suitable for mass production including vacuum-based techniques such as CVD, evaporation, sputtering and non-vacuum based like slot-die coating, roller coating and inkjet printing. Thin films are important components for solar cell and solar module devices which enable high solar energy to electricity conversion efficiency. The increasingly enormous deployment of PV and rapid development of the PV industry has placed higher requirements for fabrication technologies and equipment in terms of good film properties and low cost for mass production.
