**6. Conclusions**

TCO films (ITO and AZO) were deposited by PLD on flat and UV-NIL nanopatterned glass substrates, further these being used for developing organic heterostructures, which can find applications in optoelectronic device area. Thus, the glass substrates were patterned by UV-NIL technique, nanopillars arrays with suitable dimensions (width ~350 nm, height ~250 nm, and separation step(pitch) ~1100 nm) being fabricated. Although, the magnetron sputtering is preferred as deposition technique on large substrates, PLD is a viable alternative for fabricating high-quality TCO films with reduced roughness and appropriate optical and electrical properties by tuning the experimental deposition parameters such as: substrate temperature, oxygen pressure, target content, and laser fluence. Moreover, because the deposition of TCO films was carried at room temperature and the obtained TCO layers are

characterized by low electrical resistivity, this laser technique can be also applied in the TCO deposition on plastic substrates for developing flexible devices.

The investigations prove that AZO is suitable for replacing ITO in TCO domain considering that the deposited AZO layers are featured by similar optical and electrical properties to those revealed by ITO layers.

Organic heterostructures were deposited on the fabricated TCO films (ITO and AZO) by vacuum thermal evaporation or matrix-assisted pulsed laser evaporation. The electrical measurements show that the patterning effect improves the optical and electrical properties of the organic heterostructures obtained on the TCO layers. Consequently, compared with an organic structure developed on a flat TCO electrode, an organic structure fabricated on a nanopatterned TCO electrode can be more efficient in the optoelectronic device area.
