**Author details**

Nguyen Van Toan<sup>1</sup> \*, Truong Thi Kim Tuoi<sup>2</sup> , Nguyen Huu Trung<sup>3</sup> , Khairul Fadzli Samat<sup>4</sup> , Nguyen Van Hieu<sup>5</sup> and Takahito Ono1,2\*

1 Micro System Integration Center, Tohoku University, Sendai, Japan

2 Graduate School of Engineering, Tohoku University, Sendai, Japan

3 National Institute of Industrial Science and Technology, Nagoya, Japan

4 Fakulti Kejuruteraan Pembuatan, Universiti Teknikal Malaysia Melak, Melaka, Malaysia

5 Department of Physics and Electronic Engineering, University of Science, VNU-HCM, Vietnam

\*Address all correspondence to: nguyen.van.toan.c6@tohoku.ac.jp; takahito.ono.d4@tohoku.ac.jp

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