**Author details**

Jung-In Yoon, Chang-Hyo Son, Sung-Hoon Seol\* and Ji-Hoon Yoon Department of Refrigeration and Air-Conditioning Engineering, College of Engineering, Pukyong National University, South Korea

\*Address all correspondence to: seolsh@pknu.ac.kr

© 2021 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

*Perspective Chapter: Ultra-Low Temperature Chillers for Semiconductor Manufacturing Process DOI: http://dx.doi.org/10.5772/intechopen.98547*
