**3. Prototype configuration and experimental system construction**

The prototype configuration of the developed actuator is shown in **Figure 9**. It mainly includes a slider, a stator, a preload mechanism and a base. The stator contains a piezoelectric stack, a driving mechanism, a preload screw and a shim block. The locking force is the maximum static friction force between the indenter and the slider, it can be adjusted by the preload mechanism. One end of the linear-motion guide is a slider for precise long-stroke motion, and the other end is fixed on the base. The base is used for fixing and supporting.

#### **Figure 8.**

*Simulation analysis by FEA: (a) the static simulation deformation. (b) Analysis of equivalent stress. (c) First-order mode of the mechanism.*

*Topology Optimization Methods for Flexure Hinge Type Piezoelectric Actuators DOI: http://dx.doi.org/10.5772/intechopen.103983*

**Figure 9.** *Prototype configuration of the developed actuator.*

**Figure 10.** *The experimental system and the prototype.*

As shown in **Figure 10**, an experimental system is constructed to study the motion characteristics of the actuator. The experimental system mainly includes the prototype, a waveform generator, a power amplifier, a laser displacement sensor, a PC, a pulley, and a vibration-isolation platform. The asymmetric sawtooth wave is sent out by the waveform generator (WF 1974, Negative Feedback Corporation), then adjusted by the power amplifier (HSA 4051, Negative Feedback Corporation) as the excitation signal for the piezoelectric stack (AE0505D16). The motion characteristics are detected by the laser displacement sensor (LK-H020, Keyence Corporation), and saved in the PC. The pulley and wire are used to connect the slider and the weight, and the weight is used to calibrate the locking force and apply the load.
