*3.8.3 Microelectronic mechanical systems (MEMS)*

MEMS devices have become more commonplace as more integrated capabilities are required in smaller packages, such as cell phones, tablet computers, etc. The advantage of MEMS devices is that gyroscopes, accelerometers, and inertial measuring devices can be integrated into chip-sized packages. In order to accomplish such a feat, piezoelectric actuators and sensors are often used.

has not revealed much about their Extreme Accuracy Tasked Ordnance (EXACTO) bullet, the most likely means of manipulating the tail fins probably involves piezo-

I sincerely express my heartfelt gratitude and appreciation to my supervisors Dr. P.S.V.Subba Rao & Dr.B.Parvatheeswara Rao, Department of Physics, Andhra Uni-

, B. Srinivasa Rao<sup>3</sup>

, P.S.V. Subba Rao<sup>6</sup> and B. Parvatheeswara Rao<sup>6</sup>

, S. Ramesh<sup>4</sup>

,

versity for their supervision and guidance during the whole duration of my research. I am greatly indebted to my dear parents, family members and my wife Mrs. Niranjani Divya Revu for their constant motivation, inspiration, love and affection, It is my pleasure to acknowledge my colleagues, Finally, I express my sincere thanks to AUTHOURITIES of Vignan Group of Institutions, for his cooperation in extending me the necessary facilities to carry out my research work.

\*, B. Dhanalakshmi<sup>2</sup>

1 Vignan's Institute of Engineering for Women, Visakhapatnam, India

2 Department of Physics, Vignan's Institute of Information Technology (A),

4 School of Technology, GITAM Deemed to be University, Bengaluru, India

5 Department of Physics, Centurion University, Vizainagram, India

6 Department of Physics, Andhra University, Visakhapatnam, India

\*Address all correspondence to: cs.beera@gmail.com

provided the original work is properly cited.

**87**

3 Welfare Institute of Science, Technology and Management, Visakhapatnam, India

© 2021 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium,

electric actuators.

**Author details**

B. Chandra Sekhar<sup>1</sup>

K. Venkata Prasad<sup>5</sup>

Visakhapatnam, India

**Acknowledgements**

*Piezoelectricity and Its Applications*

*DOI: http://dx.doi.org/10.5772/intechopen.96154*
