**Author details**

Toshio Takiya1,2\* and Naoaki Fukuda1,3

1 Hitachi Zosen Corporation, Osaka, Japan

2 Hitz Collaborative Research Institute, Osaka University, Osaka, Japan

3 Research Center for the 21st Century, Osaka Prefecture University, Osaka, Japan

\*Address all correspondence to: takiya@hitachizosen.co.jp

© 2020 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

**115**

*Nanoparticle Formation and Deposition by Pulsed Laser Ablation*

[9] F.A. Houle and W.D. Hinsberg, Stochastic simulation of heat flow with application to laser–solid interactions, Appl. Phys. A, vol.66, p.143-151(1998)

[10] M. Han, S. Kiyama, M. Muto, A. Fukuda, T. Sawada and Y. Iwata, Cluster formation dynamics in a locally-confined gas layer mixed with the plume ablated by pulsed laser irradiation, Nucl. Instr. Meth. Phys. Res., B153, 302-308(1999)

[11] S. I. Anisimov, Vaporization of Metal Absorbing Laser Radiation, J. Exp. Theor. Phys., 27-1, 182-183(1968)

[12] R. Kelly, On the dual role of the Knudsen layer and unsteady, adiabatic expansion in pulse sputtering phenomena, J. Chem. Phys. 92-8,

[13] R. Kelly, A. Miotello, A. Mele, A. G. Guidoni, J. W. Hastie, P. K. Schenck and H. Okabe, Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?, Appl. Surf. Sci., vol.133-4, p.251-269(1998)

[14] C. J. Knight, Theoretical Modeling of Rapid Surface Vaporization with Back Pressure, AIAA J, 17-5, 519-523(1979)

[15] L. V. Zhigilei and B. J. Garrison, Velocity distributions of molecules ejected in laser ablation, Appl. Phys.

[16] A. V. Gusarov and I. Smurov, Targetvapour interaction and atomic collisions in pulsed laser ablation, J. Phys. D: Appl.

Bulgakova, Gas-dynamic effects of the interaction between a pulsed laserablation plume and the ambient gas: analogy with an underexpanded jet, J. Phys. D: Appl. Phys. 31, 693-703(1998)

[18] S. S. Harilal, C. V. Bindhu, M. S. Tillack, F. Najmabadi and A. C. Gaeris,

Lett. 71-4, 551-553(1997)

Phys. 34, 1147-1156(2001)

[17] A. V. Bulgakov and N. M.

5047-5056(1990)

*DOI: http://dx.doi.org/10.5772/intechopen.95299*

[2] W. T. Nichols, G. Malyavanatham, D. E. Henneke, D. T. O'Brien, M. F. Becker and J. W. Keto, Bimodal Nanoparticle Size Distributions Produced by Laser Ablation of Microparticles in Aerosols, Journal of Nanoparticle Research, vol.4,

[3] A. E. Mayer and A. A. Ebel, Shockinduced compaction of nanoparticle layers into nanostructured coating, J. Appl. Phys. 122, 165901 (2017)

[4] T. Takiya, N. Fukuda, N. Inoue, M. Han, M. Yaga and Y. Iwata, Dynamics of the Shock Wave Accompanied by Nanoparticle Formation in the PLA Processes, Adv. Studies Theor. Phys.,

[5] E. Ueno, N. Fukuda, H. Fukuoka, M. Yaga, I. Umezu, M. Han and T. Takiya, Nanoparticle formation by interaction between laser ablated plume and shock waves, 17th International Symposium on Small Particles and Inorganic Clusters,

[6] A. Higo, K. Katayama, H. Fukuoka, T. Yoshida, T. Aoki, M. Yaga and I. Umezu, Expansion of laser-induced plume after the passage of a counter shock wave through a background gas, Appl. Phys. A, vol.126, Article number:

[7] A. Vertes, R. W. Dreyfus and D. E. Platt, Modeling the thermal-to-plasma transitions for Cu photoablation, IBM J.

Res. Develop. 38-1, 4-10(1994)

[8] A. Peterlongo, A. Miotello and R. Kelly, Laser-pulse sputtering of aluminum: Vaporization, boiling, superheating, and gas-dynamic effects, Phys. Rev. E 50-6, 4716-4727(1994)

[1] H. W. Kroto, J. R. Heath, S. C. O'Brien, R. F. Curl and R. E. Smalley, C60: Buckminsterfullerene, Nature, vol.

**References**

318, p.62-163 (1985)

p.423-432(2002)

vol.4-7, 305-316(2010)

(2014)

304 (2020)

*Nanoparticle Formation and Deposition by Pulsed Laser Ablation DOI: http://dx.doi.org/10.5772/intechopen.95299*
