*5.1.4 Chemical precipitation*

In this technique from the stream of volatile metal–organic compounds, metallic components are mixed with gaseous oxidizer in a reactor. This stream of volatile mixture is transported further and oxide film precipitates on the substrate. This method has following advantages over the previous ones:

a.More chance to get a homogeneous film with a large surface area of unplanned conformation

b.enhanced rate of condensation with better quality

c.flexibility at initial stage of technical system [82].

Other most widely used techniques are as follow:

