**Author details**

Norihiro Shimoi Department of Electrical and Electronic Engineering, Tohoku Institute of Technology, Sendai, Japan

\*Address all correspondence to: n-shimoi@tohtech.ac.jp

© 2021 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

**15**

*Nonthermal Crystalline Forming of Ceramic Nanoparticles by Non-Equilibrium Excitation…*

indium–tin–oxide thin films epitaxially grown on yttria-stabilized zirconia (100) by pulsed-laser deposition." Appl.

[10] T. Minami, T. Miyata, Y. Ohtani, and Y. Mochizuki, "New Transparent Conducting Al-doped ZnO Film Preparation Techniques for Improving Resistivity Distribution in Magnetron Sputtering Deposition." Jpn. J. Appl.

[11] M. Kon, P. K. Song, Y. Shigesato, P. Frachl, A. Mizukami, and K. Suzuki, "Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes." Jpn. J. Appl. Phys. 41,

[12] N. Malkomes, M. Vergohl and B. Szyszka, "Properties of aluminumdoped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering." J. Vac. Sci.

[13] S. Ohnishi, Y. Hirokawa, T. Shiosaki, and A. Kawabata, "Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire." Jpn. J. Appl. Phys. 17,

[14] R. D. Vispute, V. Talyansky, Z. Trajanovic, S. Choopun, M. Downes, R. P. Sharma, T. Venkatesan, M. C. Woods, R. T. Lareau, K. A. Jones and A. A. Iliadis, "High quality crystalline ZnO buffer layers on sapphire (001) by pulsed laser deposition for III–V nitrides." Appl. Phys. Lett. 70,

[15] *S. major*, A. Banerjee, and K. L. Chopra, "Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis." Thin Solid

Technol. A19, 414 (2001).

Phys. Lett. 76, 2740 (2000).

Phys. 45, L409 (2006).

814 (2002).

773 (1978).

2735 (1997).

Films, 108, 333 (1983).

*DOI: http://dx.doi.org/10.5772/intechopen.97037*

conductive multicomponent oxide films prepared by magnetron sputtering." J. Vac. Sci. Technol. A17, 1765 (1999).

[2] J. Suskia, D. Largeaua, A. Steyer1, V. D. Polb and F.R. Blomb, "Optically activated ZnO/SiO2/Si cantilever beams." Sens. Actuat. A: Physical, 24, 3,

[3] S. Masuda, K. Kitamura, Y. Okumura, S. Miyatake, H. Tabata and T. Kawai, "Transparent thin film transistors using ZnO as an active channel layer and their electrical properties." J. Appl. Phys. 93,

[4] Y. Furubayashi, T. Hitosugi, Y. Yamamoto, K. Inada, G. Kinoda, Y. Hirose, T. Shimada, and T. Hasegawa, "A transparent metal: Nb-doped anatase TiO2." Appl. Phys. Lett. 86,

[5] C.-Y. Lee, Y.-T. Haung, W.-F. Su, and C.-F. Lin, "Electroluminescence from ZnO nanoparticles/organic nanocomposites." Appl. Phys. Lett. 89,

[6] H*.* Kawazoe, M. Yasukawa, *H*. Hyodo, M. Kurita, H*.* Yanagi, and *H*. Hosono, "P-type electrical conduction in transparent thin films of CuAlO2."

[7] P.-H. Yeh, Z. Li, and Z. L. Wang, "Schottky-Gated Probe-Free ZnO Nanowire Biosensor." Adv. Mater. 21,

[8] I.A. Rauf, "A novel method for preparing thin films with selective doping in a single evaporation step." J. Mater. Sci. Lett., 12, 1902 (1993).

[9] H. Ohta, M. Orita, M. Hirano, H. Tanji, H. Kawazoe and H. Hosono, "Highly electrically conductive

Nature, 389, 939 (1997).

[1] T. Minami, "Transparent and

**References**

221-225 (1990).

1624 (2003).

252101 (2005).

231116 (2006).

4975 (2009).

*Nonthermal Crystalline Forming of Ceramic Nanoparticles by Non-Equilibrium Excitation… DOI: http://dx.doi.org/10.5772/intechopen.97037*
