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**Author details**

Sensors Directorate, Ft. Belvoir, VA, USA

provided the original work is properly cited.

\*Address all correspondence to: cory.r.knick.civ@mail.mil

Cory R. Knick

*Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators*

US Army Research Laboratory (ARL), US Army Night Vision and Electronic

© 2020 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium,

*DOI: http://dx.doi.org/10.5772/intechopen.92762*

*Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators DOI: http://dx.doi.org/10.5772/intechopen.92762*
