Chapters by Dr. Nigel Smith

• Book Chapter Diffraction Based Overlay Metrology for Double Patterning Technologies
  by Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun in the book "Recent Advances in Nanofabrication Techniques and Applications" edited by Bo Cui, ISBN 978-953-307-602-7, InTech, December 12, 2011