Update my profile »
Chapters by Dr. Shigeru Hamada
Book Chapter
Strength Reliability of Micro Polycrystalline Silicon Structure
by Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto
in the book
"Microsensors"
edited by Igor Minin, ISBN 978-953-307-170-1, InTech, June 6, 2011